Carl Zeiss Auriga 60 high resolution scanning electron microscope.

Technical specification

• Accelerating voltage range: 0.01 – 30kV
• System enables imaging in SE and BSE mode
• Resolution: <2.0 nm @ 1kV, <1.0 nm @ 15kV, magnification: from 60x to 2 000 000x
• Stage movement range: 0 ÷ 110 mm in X axis, 0 ÷ 110 mm in Y axis, 1.5 ÷ 40 mm in Z axis, angle: -5° ÷ +60°, rotation: 360°
• Digital storage with 3072 x 2304 resolution (7 MP)
• Compatible with wafers up to 200mm as well as smaller samples

Application

• Observation of samples made of metals, semiconductors and lithographic structures in high resolution
• Simple analysis of material contrast and sample topography