Platform for development of new materials
Modeling and simulation platform
Platform of the technology of structures, devices and circuits
Silicon-compatible materials technology
High Temperature Horizontal Furnaces and LPCVD
Batch spray tool
Plasma Enhanced Chemical Vapour Deposition tool
Magnetron sputtering tool
ICP RIE etch system
Resist processing (coating and development)
Resist processing (bake)
Photomask cleaning
Mask aligner
Wafer bonding
Spectroscopic ellipsometer
Batch spray tool
Plasma Enhanced Chemical Vapour Deposition tool
Magnetron sputtering tool
ICP RIE etch system
Resist processing (coating and development)
Resist processing (bake)
Photomask cleaning
Mask aligner
Wafer bonding
Spectroscopic ellipsometer
Printed Electronics Platform
Bio engineering platform
Platform for diagnostics and characteristics of materials, structures, devices and circuits
